MEMS devices are now used in many of engineering applications. To provide maximum applications of devices, more precise materials are required to design the devices. As micromachining processes are technology dependant so materials should be selected with proper research. Silicon is most suitable material for micromachining processes, so maximum of silicon compounds are used to fabricate MEMS devices. Research is ongoing with experimentation of other application specific materials. MEMS-VLSI integration adds another application field in MEMS industry. More materials are now required to design devices with MEMS-VLSI integration.
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